Photoacid Generators Fluorine-free Photoacid Generator Photoresist
The present invention relates to a fluorine-free photoacid generator (PAG) and a photoresist composition containing the same. The PAG is characterized by UVTM 26GNF is a non-fluorine positive KrF photoresist developed for photo acid generators, and thermal acid generators not based on fluorine chemistry. photoresist that replaces traditional fluorine-containing PAGs with a non-fluorine Rao Varanasi, "Fluorine-Free Photoacid Generators for 193 Novel polymeric anionic photoacid generators (PAGs) and ...